Kofloc Vietnam, Cảm biến nhiệt DF-200C, Đại lý chính hãng Kofloc Vietnam
Nhà cung cấp: PitescoVietNam
Hãng sản xuất: Kofloc Vietnam
Kofloc Vietnam, Cảm biến nhiệt DF-200C, Đại lý chính hãng Kofloc Vietnam
High accuracy(±1%RD),Fast response(1 sec.max.in all range)
・Multiple ranges and multiple gases supported
・Communications functions installed as standard feature(RS485)
・RoHS/CE Standard compliant
Sensor type | Thermal sensor | |
Valve type | Normally closed proportional solenoid valve | |
Applicable gases*1 | Multiple gases : N2 (Air, H2, He, Ar, O2, CO2)*2 | |
Flow range*3 | 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM*2 | |
Control range | 2 to 100% (F.S.) | |
Response*4 | Total flow rate control range ±1 sec (within ±2% F.S.) | |
Accuracy*5 | ±1.0% S.P. (> 35% F.S.) ±0.35% F.S. (≤ 35% F.S.) |
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Repeatability | ±0.25% F.S. | |
Operating differential pressure*6 | 50 to 300 kPa (100 to 300 kPa for Ar and CO2) | |
Inlet maximum pressure | 500kPa(G) | |
Proof pressure | 980kPa(G) | |
External leak rate | ≤1.0 x 10-8 Pa·m3/sec (He) | |
Temperature | Working temp. | 5 to 50℃ |
Accuracy guaranteed temp. | 15 to 35℃ | |
Allowable storage temp. | -10 to 60℃ | |
Allowable operating humidity | 10 to 90% RH (without dew condensation) | |
Materials of gas contact part | SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM | |
Electrical connection | D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) | |
Flow rate setting signal | 0 to 5 V DC (input impedance: approx. 1 MΩ) | |
Flow rate output signal | 0 to 5 V DC (load resistance 10 kΩ) | |
Digital communication | Address setting with RS485 rotary switch : up to 99 devices (9600 bps) | |
Required power supply (DC) | +15 V DC (±5%): 150 mA, -15 V DC (±5%): 150 mA | |
Joint*7 | 1/4 F900 (standard), 1/4 UJR, Rc 1/4 | |
Mounting posture | Horizontal installation recommended. | |
Weight*8 | Approx. 850 g |